Granted Patent
Utility
US 5,647,083 · App. 08/495,216
Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus
Inventors:
Kenji Sugimoto, Nobuyasu Hiraoka, Mitsuhiro Fujita, Masami Ohtani
Patented Case
View Patent ↗
Granted: Jul 15, 1997
Filed: Jun 28, 1995
Inventors
Kenji Sugimoto
Nobuyasu Hiraoka
Mitsuhiro Fujita
Masami Ohtani
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.