IP Library › Granted Patent US 5,647,946
Granted Patent Utility
US 5,647,946 · App. 08/463,170

Structure and method including dry etching techniques for forming an array of thermal sensitive elements

Inventors: James F. Belcher, Howard R. Beratan, Scott R. Summerfelt
Patented Case View Patent ↗
Granted: Jul 15, 1997 Filed: Jun 5, 1995
Inventors
James F. Belcher
Howard R. Beratan
Scott R. Summerfelt
Assignee (at issue)
Texas Instruments Incorporated

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Quick Facts
Patent No.
US 5,647,946
App. No.
08/463,170
Filed
1995-06-05
Granted
1997-07-15
Kind
A