Granted Patent
Utility
US 5,648,282 · App. 08/066,758
Autodoping prevention and oxide layer formation apparatus
Inventor:
Kenji Yoneda
Patented Case
View Patent ↗
Granted: Jul 15, 1997
Filed: May 24, 1993
Inventor
Kenji Yoneda
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.