IP Library › Granted Patent US 5,648,293
Granted Patent Utility
US 5,648,293 · App. 08/273,156

Method of growing an amorphous silicon film

Inventors: Hiroshi Hayama, Hiroyuki Uchida, Kazushige Takechi
Patented Case View Patent ↗
Granted: Jul 15, 1997 Filed: Jul 22, 1994
Inventors
Hiroshi Hayama
Hiroyuki Uchida
Kazushige Takechi
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,648,293
App. No.
08/273,156
Filed
1994-07-22
Granted
1997-07-15
Kind
A