Granted Patent
Utility
US 5,650,877 · App. 08/514,614
Imaging system for deep ultraviolet lithography
Inventors:
Anthony R. Phillips, Jr., Paul Francis Michaloski
Patented Case
View Patent ↗
Granted: Jul 22, 1997
Filed: Aug 14, 1995
Inventors
Anthony R. Phillips, Jr.
Paul Francis Michaloski
Assignee (at issue)
Tropel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.