Granted Patent
Utility
US 5,651,834 · App. 08/521,495
Method and apparatus for CO.sub.2 cleaning with mitigated ESD
Inventors:
Min-Chung Jon, Hugh Nicholl, Peter H. Read
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Aug 30, 1995
Inventors
Min-Chung Jon
Hugh Nicholl
Peter H. Read
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.