Granted Patent
Utility
US 5,652,164 · App. 08/560,897
Semiconductor processing methods of forming stacked capacitors
Inventors:
Charles H. Dennison, Michael A. Walker
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Nov 20, 1995
Inventors
Charles H. Dennison
Michael A. Walker
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.