Granted Patent
Utility
US 5,652,167 · App. 08/083,371
Method of liquid treatment of micro-structures comprising structural members liable to be bent
Inventors:
Motoo Nakano, Hiroshi Nomura, Masaya Katayama, Toshimi Ikeda, Fumihiko Inoue, Junichi Ishikawa, Masahiro Kuwamura
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Jun 29, 1993
Inventors
Motoo Nakano
Hiroshi Nomura
Masaya Katayama
Toshimi Ikeda
Fumihiko Inoue
Junichi Ishikawa
Masahiro Kuwamura
Assignees (at issue)
Fujitsu Limited
Fujitsu VLSI Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.