Granted Patent
Utility
US 5,652,171 · App. 08/594,945
Method of manufacturing semiconductor device having capacitor
Inventors:
Yoshihisa Nagano, Eiji Fujii
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Jan 31, 1996
Inventors
Yoshihisa Nagano
Eiji Fujii
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.