Granted Patent
Utility
US 5,652,179 · App. 08/638,950
Method of fabricating sub-micron gate electrode by angle and direct evaporation
Inventors:
Walter A. Strifler, Carol Yu-Bin Lee, William Hitchens, Ronald David Remba
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Apr 24, 1996
Inventors
Walter A. Strifler
Carol Yu-Bin Lee
William Hitchens
Ronald David Remba
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.