Granted Patent
Utility
US 5,652,317 · App. 08/698,742
Antireflective coatings for photoresist compositions
Inventors:
Iain McCulloch, Ralph R. Dammel, Dana L. Durham, Ping-Hung Lu
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Aug 16, 1996
Inventors
Iain McCulloch
Ralph R. Dammel
Dana L. Durham
Ping-Hung Lu
Assignee (at issue)
Hoechst Celanese Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.