Granted Patent
Utility
US 5,653,892 · App. 08/587,260
Etching of ceramic materials with an elevated thin film
Inventors:
James F. Belcher, Robert A. Owen
Patented Case
View Patent ↗
Granted: Aug 5, 1997
Filed: Jan 16, 1996
Inventors
James F. Belcher
Robert A. Owen
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.