IP Library Granted Patent US 5,654,798
Granted Patent Utility
US 5,654,798 · App. 08/483,737

Interferometric measurement of surfaces with diffractive optics at grazing incidence

Inventor: John H. Bruning
Patented Case View Patent ↗
Granted: Aug 5, 1997 Filed: Jun 7, 1995
Inventor
John H. Bruning
Assignee (at issue)
Tropel Corporation

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Quick Facts
Patent No.
US 5,654,798
App. No.
08/483,737
Filed
1995-06-07
Granted
1997-08-05
Kind
A