Granted Patent
Utility
US 5,656,097 · App. 08/361,139
Semiconductor wafer cleaning system
Inventors:
Michael B. Olesen, Mario E. Bran
Patented Case
View Patent ↗
Granted: Aug 12, 1997
Filed: Dec 21, 1994
Inventors
Michael B. Olesen
Mario E. Bran
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.