Granted Patent
Utility
US 5,656,399 · App. 08/589,229
Process for making an x-ray mask
Inventors:
Joseph A. Abate, George K. Celler, Jerry Vhi-Yi Guo
Patented Case
View Patent ↗
Granted: Aug 12, 1997
Filed: Jan 22, 1996
Inventors
Joseph A. Abate
George K. Celler
Jerry Vhi-Yi Guo
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.