IP Library Granted Patent US 5,656,413
Granted Patent Utility
US 5,656,413 · App. 08/535,701

Low metal ion containing 4,4'-[1-[4-[1-(4-Hydroxyphenyl)-1-methylethyl]phenyl]ethylidene]bisphe nol and photoresist compositions therefrom

Inventors: M. Dalil Rahman, Daniel P. Aubin
Patented Case View Patent ↗
Granted: Aug 12, 1997 Filed: Sep 28, 1995
Inventors
M. Dalil Rahman
Daniel P. Aubin
Assignee (at issue)
Hoechst Celanese Corporation

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Quick Facts
Patent No.
US 5,656,413
App. No.
08/535,701
Filed
1995-09-28
Granted
1997-08-12
Kind
A