Granted Patent
Utility
US 5,656,512 · App. 08/457,643
Method of manufacturing a semiconductor accelerometer
Inventor:
Bruce A. Beitman
Patented Case
View Patent ↗
Granted: Aug 12, 1997
Filed: May 31, 1995
Inventor
Bruce A. Beitman
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.