Granted Patent
Utility
US 5,656,531 · App. 08/573,467
Method to form hemi-spherical grain (HSG) silicon from amorphous silicon
Inventors:
Randhir P. S. Thakur, Lyle Breiner
Patented Case
View Patent ↗
Granted: Aug 12, 1997
Filed: Dec 15, 1995
Inventors
Randhir P. S. Thakur
Lyle Breiner
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.