Granted Patent
Utility
US 5,657,334 · App. 08/601,907
External high voltage control for a laser system
Inventors:
Palash P. Das, Curtiss Lynn Mixon, Richard A. Eis, James D. Payne
Patented Case
View Patent ↗
Granted: Aug 12, 1997
Filed: Feb 15, 1996
Inventors
Palash P. Das
Curtiss Lynn Mixon
Richard A. Eis
James D. Payne
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.