Granted Patent
Utility
US 5,658,183 · App. 08/547,944
System for real-time control of semiconductor wafer polishing including optical monitoring
Inventors:
Gurtej S. Sandhu, Trung T. Doan
Patented Case
View Patent ↗
Granted: Aug 19, 1997
Filed: Oct 24, 1995
Inventors
Gurtej S. Sandhu
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.