Granted Patent
Utility
US 5,658,469 · App. 08/570,487
Method for forming re-entrant photoresist lift-off profile for thin film device processing and a thin film device made thereby
Inventor:
Michael J. Jennison
Patented Case
View Patent ↗
Granted: Aug 19, 1997
Filed: Dec 11, 1995
Inventor
Michael J. Jennison
Assignee (at issue)
Quantum Peripherals Colorado, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.