Granted Patent
Utility
US 5,658,818 · App. 08/516,973
Semiconductor processing method employing an angled sidewall
Inventors:
Salman Akram, Charles L. Turner, Alan Laulusa
Patented Case
View Patent ↗
Granted: Aug 19, 1997
Filed: Aug 18, 1995
Inventors
Salman Akram
Charles L. Turner
Alan Laulusa
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.