Granted Patent
Utility
US 5,660,640 · App. 08/491,154
Method of removing sputter deposition from components of vacuum deposition equipment
Inventor:
David Laube
Patented Case
View Patent ↗
Granted: Aug 26, 1997
Filed: Jun 16, 1995
Inventor
David Laube
Assignee (at issue)
Joray Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.