Granted Patent
Utility
US 5,660,680 · App. 08/207,459
Method for fabrication of high vertical aspect ratio thin film structures
Inventor:
Christopher Guild Keller
Patented Case
View Patent ↗
Granted: Aug 26, 1997
Filed: Mar 7, 1994
Inventor
Christopher Guild Keller
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.