Granted Patent
Utility
US 5,660,694 · App. 08/505,247
Film forming method
Inventors:
Tadahiro Ohmi, Tadashi Shibata, Hiroaki Uetake, Kazuhisa Miyashita
Patented Case
View Patent ↗
Granted: Aug 26, 1997
Filed: Oct 16, 1995
Inventors
Tadahiro Ohmi
Tadashi Shibata
Hiroaki Uetake
Kazuhisa Miyashita
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.