Granted Patent
Utility
US 5,660,700 · App. 08/281,574
Sputter coating power processing portion
Inventors:
Junichi Shimizu, Shujiro Watanabe, Satoru Takaki, Hisashi Osaki, Takuji Oyama, Eiichi Ando
Patented Case
View Patent ↗
Granted: Aug 26, 1997
Filed: Jul 28, 1994
Inventors
Junichi Shimizu
Shujiro Watanabe
Satoru Takaki
Hisashi Osaki
Takuji Oyama
Eiichi Ando
Assignee (at issue)
ASAHI GLASS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.