IP Library › Granted Patent US 5,665,253
Granted Patent Utility
US 5,665,253 · App. 08/456,211

Method of manufacturing single-wafer tunneling sensor

Inventors: Randall L. Kubena, Gary M. Atkinson
Patented Case View Patent ↗
Granted: Sep 9, 1997 Filed: May 31, 1995
Inventors
Randall L. Kubena
Gary M. Atkinson
Assignee (at issue)
HUGHES ELECTRONICS LIMITED

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Quick Facts
Patent No.
US 5,665,253
App. No.
08/456,211
Filed
1995-05-31
Granted
1997-09-09
Kind
A