Granted Patent
Utility
US 5,666,206 · App. 08/604,386
Exposure system and exposure method
Inventor:
Takayuki Uchiyama
Patented Case
View Patent ↗
Granted: Sep 9, 1997
Filed: Feb 21, 1996
Inventor
Takayuki Uchiyama
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.