Granted Patent
Utility
US 5,667,622 · App. 08/519,373
In-situ wafer temperature control apparatus for single wafer tools
Inventors:
Isahiro Hasegawa, Karl Paul Muller, Bernhard L. Poschenriedes, Hans-Joerg Timme, Theodore G. van Kessel
Patented Case
View Patent ↗
Granted: Sep 16, 1997
Filed: Aug 25, 1995
Inventors
Isahiro Hasegawa
Karl Paul Muller
Bernhard L. Poschenriedes
Hans-Joerg Timme
Theodore G. van Kessel
Assignees (at issue)
Siemens Aktiengesellschaft
International Business Machines Corporation
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.