Granted Patent
Utility
US 5,668,053 · App. 08/364,316
Method for fabricating multilayer semiconductor device
Inventor:
Takeshi Akimoto
Patented Case
View Patent ↗
Granted: Sep 16, 1997
Filed: Dec 27, 1994
Inventor
Takeshi Akimoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.