Granted Patent
Utility
US 5,668,063 · App. 08/447,809
Method of planarizing a layer of material
Inventors:
Howard Wallace Fry, Kurt James Lightfoot
Patented Case
View Patent ↗
Granted: Sep 16, 1997
Filed: May 23, 1995
Inventors
Howard Wallace Fry
Kurt James Lightfoot
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.