Granted Patent
Utility
US 5,668,733 · App. 08/417,800
Substrate processing apparatus and method
Inventors:
Toru Morimoto, Kenji Hashinoki, Tetsuya Hamada, Kenji Kamei
Patented Case
View Patent ↗
Granted: Sep 16, 1997
Filed: Apr 6, 1995
Inventors
Toru Morimoto
Kenji Hashinoki
Tetsuya Hamada
Kenji Kamei
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.