Granted Patent
Utility
US 5,672,239 · App. 08/438,261
Integrated semiconductor wafer processing system
Inventor:
Stephen P. DeOrnellas
Patented Case
View Patent ↗
Granted: Sep 30, 1997
Filed: May 10, 1995
Inventor
Stephen P. DeOrnellas
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.