Granted Patent
Utility
US 5,672,816 · App. 08/448,004
Large stage system for scanning probe microscopes and other instruments
Inventors:
Sang-Il Park, Ian R. Smith, Michael D. Kirk
Patented Case
View Patent ↗
Granted: Sep 30, 1997
Filed: May 23, 1995
Inventors
Sang-Il Park
Ian R. Smith
Michael D. Kirk
Assignee (at issue)
Park Scientific Instruments
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.