Granted Patent
Utility
US 5,677,564 · App. 08/736,651
Shallow trench isolation in integrated circuits
Inventors:
Stephen McCormack, Christine H. Chiacchia, Patrick J. Kelleher
Patented Case
View Patent ↗
Granted: Oct 14, 1997
Filed: Aug 21, 1996
Inventors
Stephen McCormack
Christine H. Chiacchia
Patrick J. Kelleher
Assignees (at issue)
AT&T Global Information Solutions Company
Hyundai Electronics America
Symbios Logic Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.