Granted Patent
Utility
US 5,677,758 · App. 08/386,266
Lithography System using dual substrate stages
Inventors:
Robert A. McEachern, Mark Lucas, Craig R. Simpson
Patented Case
View Patent ↗
Granted: Oct 14, 1997
Filed: Feb 9, 1995
Inventors
Robert A. McEachern
Mark Lucas
Craig R. Simpson
Assignee (at issue)
MRS Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.