IP Library Granted Patent US 5,679,153
Granted Patent Utility
US 5,679,153 · App. 08/346,618

Method for reducing micropipe formation in the epitaxial growth of silicon carbide and resulting silicon carbide structures

Inventors: Vladimir A. Dmitriev, Svetlana V. Rendakova, Vladimir Ivantsov, Calvin H. Carter, Jr.
Patented Case View Patent ↗
Granted: Oct 21, 1997 Filed: Nov 30, 1994
Inventors
Vladimir A. Dmitriev
Svetlana V. Rendakova
Vladimir Ivantsov
Calvin H. Carter, Jr.
Assignee (at issue)
Cree Research Inc.

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Quick Facts
Patent No.
US 5,679,153
App. No.
08/346,618
Filed
1994-11-30
Granted
1997-10-21
Kind
A