Granted Patent
Utility
US 5,681,997 · App. 08/734,088
Excitation of polysilicon based piezoresistive pressure sensors
Inventors:
Edward J. McHale, Clifford D. Fung
Patented Case
View Patent ↗
Granted: Oct 28, 1997
Filed: Jun 19, 1996
Inventors
Edward J. McHale
Clifford D. Fung
Assignee (at issue)
Fox Boro Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.