Granted Patent
Utility
US 5,683,180 · App. 08/305,129
Method for temperature measurement of semiconducting substrates having optically opaque overlayers
Inventors:
Terence J. De Lyon, John A. Roth
Patented Case
View Patent ↗
Granted: Nov 4, 1997
Filed: Sep 13, 1994
Inventors
Terence J. De Lyon
John A. Roth
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.