Granted Patent
Utility
US 5,683,548 · App. 08/605,697
Inductively coupled plasma reactor and process
Inventors:
Michael J. Hartig, John C. Arnold
Patented Case
View Patent ↗
Granted: Nov 4, 1997
Filed: Feb 22, 1996
Inventors
Michael J. Hartig
John C. Arnold
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.