IP Library Granted Patent US 5,684,587
Granted Patent Utility
US 5,684,587 · App. 08/677,381

Device and process for interferometric sizing of particles using spatial filtering of scattered radiation

Inventor: Amir A. Naqwi
Patented Case View Patent ↗
Granted: Nov 4, 1997 Filed: Jul 5, 1996
Inventor
Amir A. Naqwi
Assignee (at issue)
TSI Group Co., Ltd.

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Quick Facts
Patent No.
US 5,684,587
App. No.
08/677,381
Filed
1996-07-05
Granted
1997-11-04
Kind
A