Granted Patent
Utility
US 5,686,208 · App. 08/567,007
Process for generating a phase level of an alternating aperture phase shifting mask
Inventors:
Chin Le, Christophe Pierrat
Patented Case
View Patent ↗
Granted: Nov 11, 1997
Filed: Dec 4, 1995
Inventors
Chin Le
Christophe Pierrat
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.