Granted Patent
Utility
US 5,690,744 · App. 08/728,421
Wafer orientation alignment system
Inventor:
Richard F. Landau
Patented Case
View Patent ↗
Granted: Nov 25, 1997
Filed: Oct 10, 1996
Inventor
Richard F. Landau
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.