Granted Patent
Utility
US 5,690,796 · App. 08/567,217
Method and apparatus for layer depositions
Inventors:
Francois Dupont, Erich Bergmann
Patented Case
View Patent ↗
Granted: Nov 25, 1997
Filed: Dec 5, 1995
Inventors
Francois Dupont
Erich Bergmann
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.