Granted Patent
Utility
US 5,691,233 · App. 08/635,731
Process of forming channel stopper exactly nested in area assigned to thick field oxide layer
Inventor:
Shigeharu Matsumoto
Patented Case
View Patent ↗
Granted: Nov 25, 1997
Filed: Apr 22, 1996
Inventor
Shigeharu Matsumoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.