Granted Patent
Utility
US 5,691,571 · App. 08/578,318
Semiconductor device having fine contact hole with high aspect ratio
Inventors:
Kazuyuki Hirose, Kuniko Kikuta
Patented Case
View Patent ↗
Granted: Nov 25, 1997
Filed: Dec 26, 1995
Inventors
Kazuyuki Hirose
Kuniko Kikuta
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.