Granted Patent
Utility
US 5,693,182 · App. 08/604,643
Method for damage etching the back side of a semiconductor disk having a protected front side
Inventor:
Josef Mathuni
Patented Case
View Patent ↗
Granted: Dec 2, 1997
Filed: Feb 21, 1996
Inventor
Josef Mathuni
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.