Granted Patent
Utility
US 5,693,197 · App. 08/319,862
DC magnetron sputtering method and apparatus
Inventors:
Brij B. Lal, Allen J. Bourez, Tadashi Shinohara
Patented Case
View Patent ↗
Granted: Dec 2, 1997
Filed: Oct 6, 1994
Inventors
Brij B. Lal
Allen J. Bourez
Tadashi Shinohara
Assignee (at issue)
HMT Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.