Granted Patent
Utility
US 5,693,199 · App. 08/685,694
Single chamber sputtering assembly
Inventors:
Allen J. Bourez, Brij B. Lal, Michael A. Russak
Patented Case
View Patent ↗
Granted: Dec 2, 1997
Filed: Jul 24, 1996
Inventors
Allen J. Bourez
Brij B. Lal
Michael A. Russak
Assignee (at issue)
HMT Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.