Granted Patent
Utility
US 5,693,238 · App. 08/237,432
Method for improving the rate of a plasma enhanced vacuum treatment
Inventors:
Jacques Schmitt, Paul Muralt
Patented Case
View Patent ↗
Granted: Dec 2, 1997
Filed: May 3, 1994
Inventors
Jacques Schmitt
Paul Muralt
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.